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Beam shutters driven by MECOS technology

Fast spinning beam shutters for various types of applications

High-speed beam choppers are used in a variety of applications to clock beams of different nature in order to synchronize them with a superordinate process. Application areas include X-ray and electron beams as well as particle beams such as neutron beams in medical applications.

High-speed beam choppers using magnetic bearings can also reach significant speeds (up to 100'000 rpm) while reaching very high rotation speed accuracy.

 

Features and Benefits

  • Very high rotation speeds
  • Highest rotation speed accuracy
  • Variable duty cycle
  • Variable beam diameter
  • Minimal heating of the process medium
  • No contamination of the process
  • Maintenance free

 

Wide range of application areas:

  • Wavelength: UV, EUV, X-ray etc.
  • Particle beams (neutrons, protons, etc.)
  • Ultra-high vacuum (<10-1 mbar)

High speed shutter for the semi-conductor industry

MECOS technology is integrated in the core of the mask inspection and repair shops for the semi-conductor industry. The EUV lithography industry requires the highest accuracy of the equipment and no contamination of the process

Mecos - Magnetlagertechnologie - Magnetlager - Kompressoren & Expander - Elektromotoren - Kryogene Kreisläufe - Schwungräder - Strahlen-Shutter - Turbo-Gebläse - Messstände - Prüfstände - Vakuum-Pumpen - Steuerungs-Systeme - Sensoren - Maschinenbau - Ingenieurwesen - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering – Engineering - Mecos - Magnetic Bearing Technology - Magnetic Bearings - Compressors & Expanders - Electric Motors - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measurement Rigs - Test Rigs - Vacuum Pumps - Control Systems - Sensors - Mechanical Engineering - Engineering - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering - Engineering - Mecos - Magnetic Bearing Technology - Magnetic Bearings - Compressors & Expanders - Electric Motors - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measurement Rigs - Test Rigs - Vacuum Pumps - Control Systems - Sensors - Mechanical Engineering - Engineering - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering - Engineering - Mecos - Magnetic Bearing Technology - Magnetic Bearings - Compressors & Expanders - Electric Motors - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measurement Rigs - Test Rigs - Vacuum Pumps - Control Systems - Sensors - Mechanical Engineering - Engineering - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering - Engineering

High Speed Shutters (HSS)

Power rating:

245W at 300Hz rotational speed

Key features:

Clean room environment. Mask inspection and repair.

Scope:

Complete shutter unit

Application:

EUV semi-conductor industry

Want to learn more?

We are pleased to help you out

Contact us
mecos@mecos.com
+41 52 355 52 11